技术中心

【中文摘要】 本文总结了关于缝隙特性的研究和目前工程中洁净室压差风量的计算方法,根据这些方法设计人员仍然难以准确确定洁净室的压差风量,作者通过调查指出了目前洁净室设计和施工中存在压差风量偏大的问题,问题的起因不是因为洁净室不能做到要求的密封性,而是在于密封性比较好的洁净室存在调试的困难。本文从便于实现压力控制和节能的角度出发,提出了对洁净室的压差风量进行主动控制的观点和并通过实验初步探讨了相应的控制方法。 【英文摘要】 The research of the character of cracks and the methods of calculating the air flow rate for pressurization of cleanroom were summarized. However, the designers still can not figure out the air flow rate precisely based on these methods. Through investigation it is proved that this air flow rate is magnified in many cleanrooms. It is not because low-qualified air tightness of the enclosure, but because the difficulties in testing. From the view of pressure control and energy saving, the author pointed out that the air flow rate should be controlled actively and then provided the method to control it by analyzing an experiment. 【中文关键词】 洁净室; 缝隙; 压差风量; 压力控制 【英文关键词】 cleanroom cracks pressurized air flow rate pressure control