技术中心

【中文摘要】 半导体工业洁净室是使用新风处理机组最多的场所,而热回收技术是具有显著节能效果的措施之一。特别用于夏季工况的热回收,使其节约大量的电、煤和气等能量,本文采用EXCEL的计算方法,对不同新风参数和不同盘管露点温度条件下进行热回收计算,同时考虑对于不同地区使用防冻剂的浓度不同,给出相应修正系数。 【英文摘要】 The semiconductor industry clean room uses MAU mostly and the heat recovery technology is a device to save energy significantly which can save a massive quantity of electricity,coal and gas fuel especially in summer days. In this paper the heat recovery calculation has been performed using EXCEL method at different outside air conditions and different coil dew points. Taking into account of different specific gravity of antifreeze solutions used in different locations the corresponding correction factors are given simultaneously. 【中文关键词】 半导体工业; 洁净室新风处理机组; 热回收; 计算 【英文关键词】 semiconductor industry; MAU for the clean room; heat recovery; calculation