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摘要 结合实例，介绍了洁净室净化空调系统设计原则、气流组织形式、空气处理过程，并讨论了其空调系统的自控问题。 关键词 垂直单向流洁净室　风机过滤单元 变频 自控 干式冷盘管 Cleaning air conditioning design for a silicon chip workshop By Yao Honge Abstract With an actual example, presents the principle of cleaning air conditioning system design, air distribution forms and air handling processes for clean rooms, and discusses the problem related to control of the air conditioning system. Keywords vertical unidirectional air flow cleaning room, fan filter unit, variable frequency, auto control, dry cooling coil